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Q: Plasma chambers ( No Answer,   1 Comment )
Question  
Subject: Plasma chambers
Category: Science > Technology
Asked by: stetex-ga
List Price: $150.00
Posted: 27 Aug 2004 05:56 PDT
Expires: 26 Sep 2004 05:56 PDT
Question ID: 393346
Please could you provide a list of all the companies that manufacture
plasma equipment for gas/vapour processing. The companies should be
able to provide the turn-key solution in vacuum chambers from 1000
litres upwards. The search should not concentrate on semi-conductor
comapanies, but on surface modification in general. Web-sites, contact
details and relevant market capitalisation figures should also be
included. Cheers

Clarification of Question by stetex-ga on 13 Sep 2004 04:28 PDT
The plasma deposition chambers could range in volume from 2,000 -
10,000 litres and be able to pump down to 10-4 Torr as rapidly as
possible. They will poerate at 13.56 MHz, probably to a maximum of 1
KW and have its own built in pulse network. It needs to be able to
process using low vapour pressure liquids as well as gases.
Answer  
There is no answer at this time.

Comments  
Subject: Re: Plasma chambers
From: gelectronic-ga on 12 Sep 2004 01:55 PDT
 
http://www.huettinger.com/contacts.html
http://www.huettinger.com/products.html



the above company just manufactures power supplies & matching networks
needed for plasma procesing...if you can tell what is that
specifically looking for...like chambers...then Varian....MKS etc are
useful....
I have done my master's thesis in plasma processing for surface
modifications...but most of my research work was in Atomospheric
Pressure Plasmas...I can give you a list of companies from which we
had got our equipment from...provided you give me details of what
exactly are you looking for.
regards

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