I'd like some help identifying the typical mechanical properties of
single crystal bulk silicon please. In particular, we use 5" wafers
that are 350 microns and 525 microns thick. The mechanical properties
should include:

Young's Modulus, Poissons Ratio, Density, Tensile Strength, and
Compressive Strength.

Values for some of these may be different along different planes of
the crystalline structure, so if possible please include the values
along each axis.

Finally, if values are available for bulk silicon wafers coated with
3000 angstroms of silicon nitride or silicon oxide, that would be
helpful as well.

Thank you for your help!

1) Silicon Crystal
=====================
Here are the values for different axes:

Elastic constants
C11 = 16.60·1011 dyn/cm2
C12 = 6.40·1011 dyn/cm2
C44 = 7.96·1011 dyn/cm2

There is more on this website of the 
Yoffe institute -- a respected  physics institute of
the Russian  Academy of Sciences

This looks as though it has all the data you mentioned:

http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Si/mechanic.html

US databases are more likely to charge for such data.

Here, to  check the data. is a IEEE paper:

Silicon is expected to optimize the mechanical properties of devices made from
silicon in ... The wafer is coated with 2-nm Si02 and 49-nm Si3N4, ...
http://www.imdcorp.net/485-dld/paper-peterson-silicon-as-1.pdf



2) Silicon  Nitrate coating is harder
================================
 (Si I will give you a whole buch of  references to sift through)

STRUCTURE AND MECHANICAL PROPERTIES OF Si-BASED COATINGS ... The substrates were
crystalline silicon wafers and cutting hard alloy ...
http://ww-emrs.c-strasbourg.fr/ 2003SPRING/2003ABSTRACTS/2003_G_ABS.PDF



Here is a semi-popular article which mentions Si*Ni*
While silicon nitride is beginning to see use in the semiconductor
industry as a low thermal expansion/high corrosion resistance
substitute for alumina, its traditional use in the semiconductor
industry has been in the form of ceramic ball bearings (see Figure 3)
http://www.ceramicindustry.com/CDA/ArticleInformation/coverstory/BNPCoverStoryItem/0,2708,7831,00.html



SI3N4 COATING FOR COMPOSITES. 88. SI3N4 COMPOSITES BY SMP ROUTE. 89.
FUSED DEPOSITION
GOES COMMERCIAL ... MECHANICAL PROPERTIES OF SILICON CARBIDE ...
http://www.bccresearch.com/advmat/DHC97.htm

microstructure and mechanical properties of silicon nitride (Si3N4) ceramics..

 http://www.blackwell-synergy.com/doi/abs/10.1111/j.1551-2916.2005.00227.x


> Mr. Bolin:
>      I have found some Young's modulus values for SiNx, Au and Si thin films.
> 
>      1. SiNx   290 nm thick,   Young's modulus: 222 (+/-) 3 GPa
>          Reference: J. J. Vlassak and W. D. Nix,  J. of Materials Research,
> Vol 7,          No.12 Dec 1992, pp3242-3249.
>      2. Au    0.87 micro-meter thick, Young's modulus 57 Gpa.
>      3. Si      Young's modulus 163 GPa
>          Reference for 2 and 3: William D. Nix, "Mechanical Properties of Thin
>                 Films," Metallurgical Transactions A, Vol. 20A, Nov. 1989, pp
> 2217-2245.
> 
>      Also, please put my name on the distribution list of MEMS e-mail.
>      Thank you.
> Dick Chang
> Mechanics and Materials Technology Center
> The Aerospace Corporation
> (310)-336-5808


http://mail.mems-exchange.org/pipermail/mems-talk/1996-June/000594.html



Silicon wafer coatings, where quantitative materials. properties were derived at
several ... mechanical properties between different SiN and TiN ...
http://www.cetr.com/Brochures/0503Vienna-UNMT.pdf 




Monolithic Ceramics and High Temperature Coatings - Materials For DE
Key issues to be addressed are the dependence of mechanical properties (strength
... of Si3N4 Substrates with Environmental Barrier Coatings,? submitted for ...
http://www.ornl.gov/sci/de_materials/projects-monolithic.shtml


The Processing, Properties and Applications of Metallic and ...
High Temperature Creep Properties of a Si3N4 Ceramic Related to the Nature of
... Sermaloy J (Silicon Modified Aluminide) Coating Mechanical Improvements ...
www.emas.co.uk/ structural_integrity-TheProcessingPropertiesandApplicationsofMetallicandCeramicMaterials.html


PROCESSING, MODELING AND CONTACT MECHANICAL PROPERTIES OF SILICON NITRIDE-BASED
FGMS DC Pender* ... PHASE TRANSFORMATIOM OF Si3N4 DURING CERAMIC PROCESSING ...
http://pruffle.mit.edu/~ccarter/GRC99/posters.html


silicon wafer and aluminium substrates, using an ECWR plasma-beam source at an
... SILICON INCORPORATED DIAMOND-LIKE COATINGS FOR Si3N4 MECHANICAL SEALS ...
http://www-emrs.c-strasbourg.fr/ 2004_SPRING/2004_Book_abstract/ABSJ.pdf


Proximity gettering process for 300-mm silicon wafers, Gon-Sub Lee and Jea-Gun
... Fabrication and mechanical properties of Si3N4/SiC/TiAgCu multilayered ...
http://journal.hanyang.ac.kr/jcpr/journal_2004_3.html

 I hope this will give you some initial leads :-)

Hedgie

---

Clarification of Answer by hedgie-ga on 16 Sep 2005 20:53 PDT

Broken Link?
 http://ww-emrs.c-strasbourg.fr/2003SPRING/2003ABSTRACTS/2003_G_ABS.PDF

No. Missing w. Try 
http://www-emrs.c-strasbourg.fr/2003SPRING/2003ABSTRACTS/2003_G_ABS.PDF

 Did that cost me a fifth star???

Thank you very much Hedgie,

It appears that the Russian web site you refered me to has the bulk
compressive strength data for silicon, as well as the crystal plane
modulus values, and the Petersen paper you linked has some good
tensile strength information.

The only problem was that the link you referenced (copied below) for
the coatings appears to be broken. However, some of the other papers
you referenced in this section appear to be close to what I'm looking
for, so thank you very much!

BROKEN LINK:?
   http://ww-emrs.c-strasbourg.fr/2003SPRING/2003ABSTRACTS/2003_G_ABS.PDF