Can anyone provide me with information on the procedure for carrying
ou a four-point probe measurement using a HP 4155B Parameter analyser.
I have all the manuals, but I am still not entirely sure of the
procedure. One way is to inject a current with the SMU and measure the
voltahe using the VMU. Alternatively, sweep over a voltage range using
VSU and measure the current using SMU. I would like to try the latter.
Please could someone provide me with information on the procedure
(i.e. including details of channel and measurement setup)?

---

Clarification of Question by cats_temple-ga on 06 Dec 2005 10:39 PST

I am after tutorials or detailed steps on the procedure - something I
can adapt to my needs.

I found this for another four point measurement system. I hope this
helps. I haven't dealt with the HP 4155B before.

   1. Turn on the voltmeter, set the mode to DC and voltage range to 200 mV.
   2. Place wafer onto the probe stage.
   3. Flip the toggle switch located atop the probe station from
"NEUTRAL" TO "DOWN".
   4. Watch the probe casing lower until the probes stabilize on the wafer.
   5. Return the toggle switch of the probe station to the "NEUTRAL" position.
   6. Turn on the current source by turning the black switch "S1" to
the "ON" position.
   7. Set the current to the desired level, and proceed with measuring
the voltage across the inner two probes. Map the wafer.
   8. When measurement is finished, shut off the current source by
turning the switch "S1" to the "OFF" position.
   9. Flip the probe station toggle switch from "NEUTRAL" to "UP".
  10. Wait until the probe casing is all the way up, then set the
toggle switch back to "NEUTRAL".
  11. Turn off voltmeter.

Thanks for providing this information in response to my question.
These steps are very general and limited - so unfortunately not really
what I was looking for. In any case, I have figured out how to use the
parameter analyser. The procedure is sonsiderably more complicated
than this.