I need know information about capacitive position sensor and circuits
of capatitance and voltage converter. In SPM(scanning probe
microscopy), the probe is usually scanned in raster fashion using
piezoelectric elements; these may suffer from such pathology as
nonlinearity and hysteresis, making a direct mapping from applied
piezo voltage to probe position difficult. I do a project of
constructing a position sensor to probe position in three dimension. I
need information about that. Thanks a lot.